Optical characterization of two-dimensional photonic crystals based on spectroscopic ellipsometry with rigorous coupled-wave analysis

Abstract

A simple and non-destructive optical characterizing method for the 2D photonic crystal (PC) slab was carried out by using specular spectroscopic ellipsometry. The rigorous coupled-wave analysis (RCWA) was further applied to analyze the measured ellipsometric parameters and then to simulate the structure of the measured photonic crystal. A 2D square lattice of silicon rods fabricated by electron-beam lithography on the silicon substrate was used as a testing sample in this study. The reflectance spectrum of the characterized 2D PC was also simulated by RCWA to reflect its photonic bandgap behavior directly.