Abstract
The results of ellipsometric investigations of thin films of In2O3 and In2O3:Sn (90:10%) (ITO) and spectral measurements of the optical transmission are presented. The In2O3 films were obtained by sputtering on Al2O3 [012] substrates with the use of improved magnetron equipment VUP-5M. The ITO films on CEC015S glass substrates were manufactured by PG&O. The thicknesses, refractive indices, and forbidden band gaps of the materials were determined. The obtained values agree with previously described results, indicating that the investigated films are of good quality.
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