Abstract
abstractRecently, much work has been done to improve the optical and electrical properties of zinc oxide (ZnO) films. A comprehensive study of optical properties (transmittance and scattering), electrical properties (carrier mobility, carrier concentration, conductivity, and resistance), and surface topography allows to give recommendations for optimizing the process of obtaining layers with the parameters enabling their use in thin film solar modules. Parameters of the conductive layers can be changed by the method of doping with boron zinc oxide films, ion etching, and laser annealing.
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