Abstract
Er 3+-doped P 2O 5–SiO 2 planar waveguides, fabricated by flame hydrolysis deposition, are shown to have a higher gain than Er 3+-doped Al 2O 3–SiO 2 planar waveguides, fabricated by plasma enhanced chemical vapor deposition. An optical absorption measurement reveals that the high gain of Er 3+-doped P 2O 5–SiO 2 waveguides is due to a high population inversion. These optical properties are related to the homogeneity of the waveguide-core glasses which were analyzed with a scanning electron microscope.
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