Abstract
Al-doped zinc oxide (AZO) thin films have been prepared by pulsed laser deposition. AZO films were observed to grow along the c-axis orientation of (0 0 2). Optical and photoluminescent properties of the AZO films have been investigated. The UV absorption edge was blue shifted with increasing Al doping concentration. AZO films with different Al contents observe only ultraviolet emission without notable DLEs. All films have an average optical transparency over 80% in the visible range. The possible origins responsible for these emission bands have been discussed.
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