Abstract
A simplified model of low-frequency inductively coupled plasma generated in a U-shaped discharge tube has been developed. The model is based on the simultaneous solution of radial continuity equations for electrons and metastable atoms, gas temperature and electron mean energy. New data on plasma parameters of a low-frequency inductively coupled gas discharge have been obtained, for the case of argon plasma forming gas, in the range of discharge currents from 1 to 10 A and low argon pressures from 1 to 20 Pa. The numerical results agree with the present experimental and numerical data and describe the main discharge features, i.e. the low values of electric field strength from 0.2 to 0.6 V/cm, the decreasing voltage-current characteristics, and the decreasing electric field strength pressure dependencies.
Published Version
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