One-step femtosecond laser welding and internal machining of three glass substrates

Abstract

In this paper, it demonstrated one-step femtosecond laser welding and internal machining of three fused silica substrates in the optical- and non-optical-contact regimes by focusing 1030-nm laser pulses at the middle of the second substrate. Focusing laser pulses within the second glass in optical-contact and non-optical-contact samples induces permanent internal structural modification, leading to the three glass substrates bonding together simultaneously. The bonding mechanism is based on the internal modification of glass, and this mechanism is different from that of ordinary glass welding at the interface. Welding-spot size is affected by not only the gap distance (ablation effect) and heat transmission, but also by gravity through examining the sizes of the welding spots on the four contact welding surfaces. The maximum bonding strength of the lower interface (56.2 MPa) in the optical-contact regime is more than double that (27.6 MPa) in the non-optical-contact regime.