Abstract
A one-dimensional self-consistent numerical model for dielectric barrier discharge (DBD) in Xenon is presented. Continuity equations for charged particles, rate equations for excited particles and Poisson's equation are solved. Electrons, ions, excited atoms and excimer density distributions in space and time are simulated in the model. Electrical parameters in a micro-discharge such as electric field, voltage across the gas gap, current density and accumulated charges on both dielectric surfaces are obtained. UV radiation intensities and their efficiencies in a micro-discharge are calculated.
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