Abstract
Laser-induced dot transfer is an innovative micropatterning technique that realizes on-demand microdot deposition under room-temperature atmospheric conditions. Based on this method, we have developed site- and size-controlled micropatterning of oxide materials. As a model case, indium tin oxide (ITO) microdots were arrayed on a receiver substrate. A nanosecond, 266 nm laser pulse was focused onto the interface between the ITO film and transparent support, causing the ejection of a single ITO microdroplet. The dependence of the transferred structures on the film thickness as well as the laser-induced film temperature distribution has been investigated by both experimental and finite elemental approaches.
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