Abstract
AbstractThe quartz crystal microbalance (QCM) has a wide range of applications in surface physics and surface chemistry. We present result obtained by combining the high areal density sensitivety of the QCM with surface sensitive spectroscopies like Auger electron spectroscopy (AES) and ion surface scattering (ISS). One type of experiments deals with measurements of sputtering yield variations during ion profiling of metal‐metal interfaces, situated at the surface of the QCM, as a function of varying surface composition. A new method for online measurements of angular distributions of sputtered particles from a solid surface, by utilizing the QCM's as collectors of the ejected particles, is the subject of the other type of experiment.
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