Abstract
An experimental method is presented for performing angle-resolved Auger electron spectroscopy (ARAES) using a cylindrical mirror analyzer. The significant increase in surface sensitivity attainable with this technique is illustrated by spectra taken from sputtered and annealed Pt3Sn surfaces and the native oxide layer on a Si(111) surface. Comparison of compositions obtained from Pt3Sn surfaces using surface-sensitive Auger electron spectroscopy (AES) and ion scattering spectroscopy (ISS) show that the surface sensitivity of AES can approach that of ISS. Comparison of results taken from the native oxide layer on Si(111) suggests that ARAES may be more highly surface sensitive than angle-resolved x-ray photoelectron spectroscopy.
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