Abstract
We report on the destructive sputtering of NiC multilayer coatings which have a periodicity of 2.7 nm, using H + as well as Ar + ions of 750 eV energy. The influence of ion bombardment on interface roughness, interface mixing and density has been investigated by monitoring this process in situ using a soft X-ray reflection system. Ion bombardment has been demonstrated to decrease the roughness of a sputtered surface while a considerable intermixing of the interface below the sputtered layer occurs. Changes in the film density have not been observed.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
