On the use of a ZrO x -SiO2 multilayer structure as a test sample for high-resolution X-ray microscopy

Abstract

An image of a ZrOx-SiO2 multilayer structure with a magnification factor of 46, recorded in the mode of high-resolution transmission electron microscopy, and the absorption profile of the multilayer structure, recorded by scanning X-ray microscopy, are obtained using X-ray compound refractive lenses (CRL). Based on these results, a conclusion can be drawn regarding the possibility of using the multilayer structure as a universal test object for high-resolution X-ray microscopy.