Abstract
小形の容量形受圧素子の設計に必要な素子の圧力変動に対する応答特性の解析法を表すとともに高感度・広帯域圧力測定を行うための電気的検出法を示した. 数種の素子と圧力変換器, 増幅器を試作して行った動的実験とほかの高精度圧力測定法との静的比較試験から, 解析法が素子の応答を十分表現できること, 本法により少なくとも圧力分解能0.002mmAq(0.02Pa)の高感度な圧力測定が可能であることを確かめた.
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