Abstract

This paper presents analysing methods of the response characteristics necessary for designing a miniature pressure detector of capacitance type and electronic methods for realizing a sensitive and wide-band measurement of pressure. Several detectors, a transducer and an amplifier are prepared with the object of examining the adaptability and practicality of these methods. Dynamic measurement and static comparative test between the present device and the other high-sensitive pressure measuring methods show that the analysis can well express the detector response to pressure and that the present method enables measurements more sensitive than the resolution of 0.002 mmAq (0.02 Pa).

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