Abstract
The peculiarities inherent to a-C:H film removal, Mo oxidation in a flowing glow discharge of oxygen, and molybdenum-oxide reduction in deuterium discharge are investigated at T = 300–320 K. After carbon is removed under O2 discharge conditions, a steady-state MoO3 layer with a limiting thickness of 25–30 nm is formed on large-block molybdenum with the predominant orientation Mo(110). Oxide films are reduced in deuterium plasma at a selective sputtering yield on the order of 0.01 O atom/D+2 ion. If the interior Mo surfaces of a thermonuclear reactor are cleaned of hydrocarbon sediments via oxygen discharge, the working chamber must be additionally exposed to deuterium plasma for 8–10 h to remove oxygen from the generated a-MoO3 layers with the greatest possible oxygen content of 4–4.5 µg/cm2.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callMore From: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
