On the Prospects for the Study of a Point Discharge Sustained by a Terahertz Free Electron Laser Radiation in an Inhomogeneous Gas Flow

Alexander V Vodopyanov,Oleg A Shevchenko,Alexander V Sidorov,Yaroslav I Gorbachev,Alexey P Veselov,Vitaly V Kubarev

doi:10.1109/irmmw-thz.2019.8874193

On the Prospects for the Study of a Point Discharge Sustained by a Terahertz Free Electron Laser Radiation in an Inhomogeneous Gas Flow

Alexander V Vodopyanov, Oleg A Shevchenko + Show 4 more

https://doi.org/10.1109/irmmw-thz.2019.8874193

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Publication Date: Sep 1, 2019

Citations: 1

Affiliation: Budker Institute of Nuclear Physics, Institute of Applied Physics

#Inhomogeneous Gas Flow #Terahertz Free Electron Laser + Show 8 more

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Abstract

It is proposed to use high-power radiation from a terahertz free electron laser to create a localized (point-like) discharge in an inhomogeneous gas flow. Plasma parameters that can be achieved in such a system open up prospects for creating an effective point-like source of extreme ultraviolet light for the next-generation projection lithography.

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