Abstract

An intense, monochromatic, extreme ultraviolet (121.6 nm) light source has been constructed for testing extreme ultraviolet light rejecting filters. The source and detection system operates at atmospheric pressure, is physically compact, and is relatively inexpensive to build. A calibrated neutral density filter with a transmission of 1×10−6 is used as a reference. The light source has been used to measure transmissions as small as 9×10−6 quickly (in less than 1 min) with negligible background levels.

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