On the measurements in an electron cyclotron resonance plasma by the electric probes

Abstract

Summary form only given, as follows. Plasma diagnostics in the reaction zone of an electron cyclotron resonance (ECR) plasma chemical vapor deposition (CVD) apparatus has been performed using fast injection Langmuir probes and ion energy analyzers. Further studies of the behavior of plasma parameters, i.e., electron temperature plasma density and ion energy due to the ambipolar potential were made according to pressure, magnetic field geometry, and the microwave input power. The pressure dependence can be explained in terms of an analytical model based on the experimental results. The effects of magnetic field geometry and gas pressure on the hot electron temperature have been experimentally examined. Whether the fast neutrals could be generated as a consequence of charge exchange collisions has been investigated.