On the long pulse operation of an x-ray preionized, gas discharge pumped ArF excimer laser

Abstract

Long laser pulses of up to 120 ns full width at half maximum have been achieved in a discharge pumped ArF laser, using x-ray preionization and prepulse-mainpulse excitation using a magnetic switch. For the realization of these long pulse lengths a fast current rise time in the first stage of the discharge is a crucial factor. The laser performance depends strongly on the discharge stability, and thus on the partial pressure of the fluorine in the laser gas mixture.