Abstract
This paper presents a detailed model of cluster formation from a supersaturated atomic vapor in an inert buffer gas. The population balance equations for the cluster size distribution are based on the Smoluchowski coagulation equation and take into account (i) convective diffusion of clusters, (ii) cluster loss to walls of an aggregation chamber, and (iii) formation of fractal-like aggregates. The model predictions are confronted to experimental observations, and they agree with experimental data on Cu particle formation in NC200-UHV nanocluster source. The model can be used as an aid in tuning the experimental parameters for attaining a desired nanoparticle size distribution.
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