Abstract
The theory developed in a previous paper representing the energy distribution of self-sputtered atoms is now generalized for the case of arbitrary ratios of atom to ion masses. The result is obtained by the Chandrasekhar method of approximate solution of the Boltzmann equation which seems to be a more suitable instrument for the problem than the usually applied method of angular moments. The analysis is performed for the Lindhard scattering cross section and is valid in a wide range of ion energies.
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