Abstract
According to the Sigmund theory of sputtering, the distribution function of recoil atoms in the target is proportional to 1 E 2 for recoil energies E much less than the energy of the ion beam E 0. Recently Waldeer and Urbassek in their theory of self-sputtering showed that more accurate treatment of the target surface leads to a logarithmic correction in the distribution which takes the form (1/E 2) [ ln(E 0/E)] 3 2 . This result is also valid for E ⪡ e 0. In the present work, within the limits of the hard-sphere scattering cross section, the Waldeer-Urbassek theory is generalized for the case of arbitrary recoil energies.
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