On the double resonance activation of electrostatically actuated microbeam based resonators

Abstract

Electrostatically actuated microelectromechanical system (MEMS) devices have shown prominent potential in various applications. However, despite their low power consumption, they do require high input voltages to be actuated. This is even worse if these devices are driven around their mechanical resonant state. Assuming a double resonance excitation scheme, both electrically and mechanically, activates the system’s mechanical and electrical resonances simultaneously. This double resonance activation was recently verified experimentally to alleviate the problem of high actuating voltage/displacement near the resonant state. Therefore, in this work, an analytical electro-mechanical coupled model for a double-resonance-driven microbeam, assuming a classical nonlinear beam model combined with an RLC electric circuit model is first proposed and then numerically examined. Good match among the numerical simulations and the experimental data when the electrical resonance frequency band is sufficiently high is demonstrated. The suggested model can be used to further optimize certain MEMS designs and therefore fully benefit from this double resonance activation scheme in improving MEMS sensors and actuators.