Abstract
The carbon bonding ratio in diamond-like carbon (DLC) thin films has been estimated from the ε 2 spectra obtained by spectroscopic ellipsometry. A method has been developed to find out the atomic fractions of sp 3- and sp 2-bonded carbon atoms by combining the various features of the existing methods. The atomic fraction of sp 2-bonded carbon atoms has been determined by fitting the gaussian curves in the experimentally observed ε 2, spectra in the low energy range (< 4 eV). The atomic fraction of sp 3-bonded carbon atoms has been determined by calculating the total electron density in the DLC matrix. The amount of hydrogen present in DLC films has also been taken into account.
Published Version
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