Abstract
The angular distributions of atoms sputtered by the noble gas cluster ion beam from metal surfaces are studied. The experimental results on the angular distributions of Cu and W atoms sputtered by 10 keV Ar, Kr, and Xe GCIB are presented. The deviation from the conventional « lateral » angular distribution, found in previous works was studied in detail with new experimental data.The molecular dynamics simulations are performed for the detailed study of the mechanisms that affect the angular distributions. The simulation of consequent impacts considered the effects of the bombarding cluster ion fluence and cluster size distribution. The significant effect of energy per cluster atom on the angular distributions was revealed and explained. Both the cluster size distribution and the surface topography were found to affect the angular distributions of sputtered atoms. The mechanisms of these effects were analyzed.
Published Version
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