Abstract
Predicting air damping is crucial in the design of high Q microelectromechanical systems. In the past, air damping of rigid microbeam in free space at molecular regime is usually estimated using the free molecular model proposed by Christian (Vacuum 16:175–178, 1966), air damping of flexible microbeam is estimated using the model proposed by Blom (J Vac Sci Technol B 10:19–26, 1992). The relation between the two models is Q Blom = 3Q Christian. In this paper, a general proof is presented that shows the Christian’s model is valid for the air damping of flexible microbeam in free space at molecular regime. By comparing with the experimental results available in the literatures (Blom et al. in J Vac Sci Technol B 10:19–26, 1992; Yasumura et al. in J Micromech Syst 9:117–125, 2000), we conclude that the Christian’s model is the best choice in predicting the air damping of flexible microbeam in free space at the molecular regime.
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