Abstract

It has been generally assumed that, in a transmission electron microscope, there exists some combination of lens excitations that will yield almost parallel illumination over a large area of the sample. This assumption is incorrect, when the objective is an immersion lens, due to the beam rotation in the magnetic field. The lack of parallelism is outside the control of the operator and is proportional to the diameter of the illuminated area. It has been measured, in a typical case, as 0.4 mrad/μm, a value that agrees well with calculation. This effect is large and needs to be taken into account when using techniques where parallel illumination is desired.

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