On-Line Thickness Measurement of Thin Film Based on Neural Network

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This paper proposes a on-line thickness measurement scheme of thin film based on the capacitance thickness sensor and introduces the composition and principle of thickness measurement system. Then it further states the principle and simulation of the RBF neural network, which can effectively predict the thickness deviation of thin film by setting the appropriate parameters. The monitoring method based on the RBF neural network will reduce production cost and make the film thickness uniformity better, combining the traditional film production line with an new idea of controlling the opening degree of wind ring.