On-Demand Deposition of Functional Oxide Microdots by Double-Pulse Laser-Induced Dot Transfer

Abstract

We have newly developed a double-pulse laser-induced dot transfer technique to realize ondemand deposition of functional oxide microdots under room-temperature atmospheric conditions. In our double-pulse system, the first pulse was irradiated to preheat an oxide source film, and then the second pulse was more tightly focused on the same position to deposit an oxide microdot onto a receiver substrate. As a model case, indium tin oxide microdots with much smaller lateral dimensions than the laser focal area were reproducibly arrayed on a silica glass substrate by the doublepulse process, while there were microdot vacancies at a rate of approximately 30 % in the case of a single-pulse process without preheating. In order to explore the effect of double-pulse, laser-induced temperature distribution was also investigated from a finite elemental approach.