Abstract
An on-demand atmospheric pressure storage system for AsH3 and PH3, which eliminates the sudden release hazard associated with compressed gases, has been developed and tested with AsH3. The storage system is based on the adsorption of these gases into the microcavities of synthetic zeolites at 23 °C and subsequent desorption at higher temperatures. The adsorption isotherm and isobar of AsH3 on NaA and CaA zeolites were measured. At 23 °C and 760 Torr AsH3 pressure, an adsorption capacity of 25 wt. % (AsH3/zeolite) was measured for CaA zeolite. About 100% of the adsorbed AsH3 was recovered at desorption temperatures below 190 °C. Preliminary results of operating a 500 cc prototype AsH3-zeolite storage system connected to an organometallic vapor phase epitaxy reactor for the growth of GaAs and AlGaAs show that the purity of the AsH3 is retained during the adsorption/desorption process.
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