Abstract
AbstractThis paper demonstrates the on‐chip terahertz (THz) helical antenna based on metal self‐rolled‐up membrane (M‐SRuM) nanotechnology, which utilizes the residual stress in multilayer metal membrane deposited by electron beam (E‐beam) evaporation to provide the rolling force and to form the radiation body of the helical antenna. Precise design method is proposed based on multi‐physics modeling for mechanical and electrical analysis, and the two operating modes of on‐chip helical antenna are modeled and analyzed. The test results show that the normal mode of self‐rolled‐up THz helical antenna is able to operate at frequency as high as 0.223 THz with the corresponding impedance bandwidth of 13 GHz.
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