Abstract
The use of a novel sulfur source, methylmercaptan, CH3SH (MSH), for OMVPE growth of ZnS and Zn(S,Se) has been developed for the first time. Gas-phase prereaction was not observed, and the growth temperature of ZnS was successfully reduced, compared with growth using dialkyl-compounds. Zn(S,Se) alloy epilayers lattice-matched to GaAs substrates had specular surface morphology, excellent crystallographic properties, and showed strong excitonic emissions but weak intensities of deep level emissions.
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