Abstract
Future cosmic microwave background (CMB) experiments will deploy increasing numbers of superconducting detectors with requirements for increased sensitivity and reduced systematics. We report on the ongoing development of OMT-coupled CMB detectors at Argonne National Laboratory. Key areas of development include bolometers with dual Transition Edge Sensors (TES) for easier lab characterization, a hybrid SiN membrane fabrication process, a chemical vapor deposition (CVD) SiN dielectric process, and a new pixel design for improved compatibility with large scale fabrication. These developments enhance our ability to fabricate large-scale (150 mm diameter wafers) detector arrays with the performance necessary for future CMB experiments.
Published Version
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