Abstract
AbstractChemical reactions in the vapor phase during metalorganic vapor phase epitaxy growth of ZnO are investigated with in‐situ monitoring using Fourier transform infrared spectroscopy. Diethylzin (DEZn) and nitrous oxide (N2O) were used for zinc and oxygen source, respectively. DEZn reacts first with oxygen atom generated from N2O dissociation, and changes to diethoxy zinc (DEOZn; Zn(OC2H5)2). Then C2H4 is eliminated from DEOZn at high temperature, and DEOZn changes to zinc dihydroxide (Zn(OH)2). In addition to these reactions, oligomerization of the reactants occurs, that is, they make their dimers, trimers, tetramers and higher‐order oligomers, and they contribute to the formation of ZnO on the substrates. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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