Off-Axis Laserdeposition of YBa2Cu3O7-δ thin films and SrTiO3 insulation layers

Abstract

We report on YBa2Cu3O7-δ thin film preparation by a new laser deposition geometry, the so-called off-axis laser deposition. The main modification of off-axis laser deposition is the change of the substrate orientation in relation to the laser-induced plume. This results in c-axis oriented, epitaxial YBa2Cu3O7-δ thin films with standard Jc-values (>106 A/cm2 at 77K and zero field) and an exceptionally good surface quality. Due to this low surface roughness it is possible to prepare thin (30nm) SrTiO3 insulating layers. The insulation resistance of such a SrTiO layer (between two YBCO layers) is >5MΩ. Using this off-axis geometry it is also possible to coat both sides of a substrate simultaneously, providing a one-step process in double-sided thin film deposition even on large and relatively thin substrates. Identical critical current densities (above 106 A/cm2) were obtained for both films on the substrate.