Abstract
Y2O3 ceramics were immersed in microwave-excited Ar, Kr, and Xe plasmas, and the sputtering of yttrium atoms from Y2O3 ceramics as a result of low-energy (range of approximately 10 eV) Ar, Kr, and Xe ion bombardment was observed. The amount of sputtered yttrium atoms well correlated with the ion bombardment energy estimated by Langmuir probe measurement. The estimated sputtering yield was 10−5 or less for such a low ion bombardment condition.
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