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Abstract
A gas analyzer based on the principle of ion backscattering has been developed to measure both pressures of helium and deuterium and is called A–U gauge. The A–U gauge is applied to observe a detrapping process of retained deuterium in a graphite (IG‐100 ) during rf‐glow discharge with helium gas. The detrapping behavior of D atoms from the graphite is discussed with a simplified local mixing model.
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Schedule a callMore From: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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