Numerical study on jet effect in the vertical showerhead MOCVD reactor

Abstract

Numerical simulations are conducted about jet effects in the vertical showerhead MOCVD reactor. By varying the reactor height, nozzle spacing, jet speed and susceptor rotating speed, the flow, temperature and concentration fields in the reactor are simulated, so as to gain insights into the jet effect in vertical MOCVD reactor. It is concluded that (1) in the reactor chamber below the showerhead, velocity, temperature and concentration are all in periodic fluctuation, and the fluctuations decay gradually from the susceptor center to the edge; (2) the vertical velocity at the susceptor center is larger than that in the edge, the precursor concentration in the center is higher than that in the edge, and the temperature in the center is lower than that in the edge; (3) increasing the reactor height and the susceptor rotating speed, decreasing the nozzle spacing and the jet outlet velocity, the radial fluctuations of both axial jet velocity and precursor concentration will be depressed.