Abstract
AbstractIn a typical Cz set‐up, the silicon melt sustained in a fused silica crucible is exposed to oxygen dissolving from the hot crucible walls. The reduction of oxygen incorporation into the growing silicon crystal poses one of the crucial challenges. Quartz dissolution rate can be minimized and SiO evaporation rate enhanced if melted silicon is exposed to double‐frequency upwards travelling magnet fields (TMFs) generated within KRISTMAG® heater magnet modules (HMMs) positioned around the crucible. Our numerical results show the shift of the maximum of the Lorentz force density and consequently velocity away from the crucible walls. The obtained flow patterns can be advantageous for the oxygen control in Cz silicon growth due to accelerated transport of dissolved oxygen towards melt free surface without simultaneous enhancement of oxygen dissolution rate from the silica crucible walls. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)
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