Numerical study on characteristics of radio-frequency discharge at atmospheric pressure in argon with small admixtures of oxygen

Abstract

In this paper, a 1D fluid model is developed to study the characteristics of a discharge in argon with small admixtures of oxygen at atmospheric pressure. This model consists of a series of equations, including continuity equations for electrons, positive ions, negative ions and neutral particles, the energy equation, and the Poisson equation for electric potential. Special attention has been paid to the electron energy dissipation and the mechanisms of electron heating, while the admixture of oxygen is in the range of 0.1%–0.6%. It is found that when the oxygen-to-argon ratio grows, the discharge is obviously divided into three stages: electron growth, electron reduction and the electron remaining unchanged. Furthermore, the cycle-averaged electric field, electron temperature, electron Ohmic heating, electron collisionless heating, electron energy dissipation and the net electron production are also studied in detail, and when the oxygen-to-argon ratio is relatively larger (R = 0.6%), double value peaks of electron Ohmic heating appear in the sheath. According to the results of the numerical simulation, various oxygen-to-argon ratios result in different amounts of electron energy dissipation and electron heating.