Abstract

Diffuse barrier discharges (BDs) are characterized by the periodicity of their discharge current and by the uniform coverage of the entire electrode surface by the plasma. Up to now the discharge development, their appearance and dynamics cannot be adequately explained by elementary processes. Different processes are discussed in the literature controversially, in particular the importance of volume and surface processes on the pre-ionization (Penning-ionization, secondary (γ-) processes, role of surface charges). Diffuse BDs in nitrogen with small admixtures of oxygen are investigated by plasma diagnostics (current/voltage-oscillography, optical emission spectroscopy) and numerical modelling. Special attention is paid to the transition to the usual filamentary mode, characterized by the presence of micro-discharges and caused by the admixture of oxygen in the range of 0–1200 ppm (parts-per-million). This transition starts at low values of O2 (about 450 ppm) and is introduced by an oscillative multi-peak mode. At higher admixtures (about 1000 ppm) the micro-discharges are generated. According to the results of numerical modelling, secondary electron emission by N2(A 3Σu) metastable states plays a major role in discharge maintenance. Due to the much more effective quenching of these states by O2 and NO than by N2 the subsequent delivery of electrons will be decreased when the oxygen amount is increased.

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