Abstract
Vibration control in microsystems is an important challenge. Because of the space limitation, structures that consume minimal space but provide effective performance need to be identified. In this research, we evaluate the vibration damping performance of various Kelvin-cell structures in microsystems using the Finite Element Method. Nine types of unit cells are designed based on the tetrakaidecahedron with different geometric parameters. The lattices are composed of the aforementioned unit cells, and two types of boundary condition are set according to the actual application scenarios. The results of the simulation include dissipated energy , isolation efficiency, etc. The results are compared with each other and two types of non-Kelvin-cell structures. This comparative analysis aims to inform the development of space-efficient vibration absorbers for microsystems.
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