Numerical simulation of relative sensitivity factor of Bayard–Alpert gauge

Abstract

The relative sensitivity factor of a Bayard–Alpert gauge (B–A gauge) was estimated from the ratio of the ionization cross section and simulation using the finite element method. The relative sensitivity factor values in the literature were compared with the calculated values. The values in the literature and the calculated values exhibited an almost linear relationship under the same conditions of the voltage applied to the electrode. The relative sensitivity factor changes with increasing pressure, owing to the mixing of electrons generated by electron impact ionization into the emission current.