Abstract
In this paper, the irradiation effect of different atomic number incident ions on benzocylobutene(BCB) material was investigated by using the Monte Carlo method. The results indicated that the projected range of theof the ions got decreased and the irradiation damage region was moved closer to the surface with the increase of ion atomic number. However, the stopping power was increased with the increase of ion atomic number. Moreover, with the increase of the atomic number, particle distribution, ionization energy loss, vacancies and phonons are more in the irradiation damage zone, the radiation damage mechanism caused by the recoil atoms gradually dominates, and the influence caused by the incident particles is becoming secondary
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