Numerical simulation of an RF asymmetric nonthermal plasma reactor used for plasma polymerisation

Samira Elaissi ,Haifa A Alyousef

doi:10.21152/1750-9548.13.2.131

Abstract

The aims of this paper is to investigate the control of plasma properties via the geometrical asymmetry effect in a capacitive coupled discharge used for polymer processing. The simulation results prove that the bulk position and density profiles of positive ions, negative ions, and electrons have a clear dependence on geometric asymmetry effect. The underlying mechanisms identified shows a more collisional sheath at the smaller powered surface due to the larger sheath width, and a higher energy at the smaller surface due to the higher mean sheath voltage compared to the larger surface. The argon modelling results are compared to experimental results from the literature for a range of operating conditions. The results show that the argon model results can be used to predict the plasma parameters for other gases used for polymer processing.

Highlights

Plasma polymerization means the fragmentation and subsequent deposition of organic precursors or monomers
It is possible to use a single gas or a mixture of gases
This gas is fed into the reaction chamber forming the plasma that is deposited on substrate to realize film deposition

Summary

Introduction

Plasma polymerization means the fragmentation and subsequent deposition of organic precursors or monomers. It is possible to use a single gas (organic monomer gas) or a mixture of gases (organic monomer gas combined with argon or helium). This gas is fed into the reaction chamber forming the plasma that is deposited on substrate to realize film deposition. The literature review revealed that the application of plasma-polymerized surfaces is associated with biomedical uses, as immobilized enzymes, sterilization and pasteurization, the textile industry, electronics (amorphous semiconductors), electrics (insulators, thin film dielectrics), optical applications, chemical processing (reverse osmosis membrane, permselective membrane) and surface modification (adhesive improvement, protective coating). The biomedical application of plasma polymerization mainly relies on changing the surface chemistry and tailoring the surface to be either bio reactive or nonreactive [1].

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