Abstract
Modeling and simulation of laser-matter interaction with aluminum thin film on silicon substrate is conducted using a 1D radiation hydrodynamics code, known as HYADES. Various physical processes at the microscopic/atomic level during laser-matter interaction including laser deposition, ionization, thermal energy transport, and hydrodynamics motion are considered in the model. To validate the numerical model, single pulse laser irradiation experiments are conducted. Cross sectional profiles of the ablation sites are characterized, and ablation depths are extracted from the profiles. The numerical model is verified by comparing model predictions with experimental results. The validated model will be used in the future to study the effects of various laser parameters (e.g., laser fluence, pulse duration, laser wavelength, pulse train) on ablation efficiency and quality (e.g., ablation depth, heat affected zone).
Published Version
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