Abstract
In this letter, a dielectric-modulated GAA MOSFET with vacuum gate dielectric is proposed for enhanced sensitivity for label-free detection of neutral and charged biomolecules. We developed an analytical model to model the response of GAA MOSFET in the presence of biomolecules. The model is verified with simulation results of ATLAS-3-D. Results indicate that GAA MOSFET biosensor with vacuum gate dielectric is able to serve as a highly sensitive low-power label-free biosensor along with advantages of robustness, reliability, and CMOS compatibility.
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