Abstract
This paper focuses on the fused silica material removal efficiency with different nozzle structures during nano-SiO2 jet polishing. The removal function and flow field distribution are with different nozzle structures obtained from the numerical and experimental investigations. The results show that under the same conditions, the removal efficiency of single-slit nozzle is 2.55 times that of single-hole nozzle, and the removal efficiency of multi-slit nozzle is 1.65 times that of the single-slit nozzle. The optimal length and width of a single slit is 5 mm and 0.6 mm, respectively. Finally, the variation of surface roughness is obtained with slit nozzle structure. With the increase of removal depth, the surface roughness of fused silica decreased from 1.86 nm to 0.491 nm, which further verified that the slit nozzle can quickly achieve super-smooth machining of fused silica surface during nano-SiO2 jet polishing.
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