Abstract
A review of multidimensional radio‐frequency (rf) discharge models for capacitively‐ and inductively‐coupled plasma sources are presented in this paper. The models for capacitively‐coupled discharges include single‐ and three‐moment fluid models, direct solutions of the Boltzmann equation and particle simulations. The results from those capacitively‐coupled models are compared for better understanding the physical insight. Analytical kinetic model is used to investigate the particle‐wave interaction in a planar inductively‐coupled plasma source. The comparison of electron energy distribution functions with experimental results is also presented.
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